Time-of-Flight Secondary Ion Mass Spectrometer (ToF-SIMS)

The instrument is operated by the Laboratory for Microscopy and Spectroscopy from KIT.


  • Bi/Mn Source (Bi+, Bi3+, Bi3++, Mn+)
  • Mass resolution: up to 11000 m/Δm @ 29 amu (bunched mode)
  • Spatial resolution < 150 nm (collimated mode)
  • Surface sensitivity < 5 nm
  • Cs thermion source and O2 EI source …

Helmholtz Imaging spinning wheel

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