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Time-of-Flight Secondary Ion Mass Spectrometer (ToF-SIMS)

Site:

Eggenstein-Leopoldshafen

RESOLUTION (nm)
150.0  -   -

The instrument is operated by the Laboratory for Microscopy and Spectroscopy from KIT.


Features



  • Bi/Mn Source (Bi+, Bi3+, Bi3++, Mn+)

  • Mass resolution: up to 11000 m/Δm @ 29 amu (bunched mode)

  • Spatial resolution < 150 nm (collimated mode)

  • Surface sensitivity < 5 nm

  • Cs thermion source and O2 EI source for sputter depth profiling, Zalar-rotation possible

  • Argon cluster ion source for analysis and sputter depth profiling of organic samples

  • Transfer vessel for atmosphere contact free sample transport from glove boxes to the spectrometer

  • Sample heating and cooling in UHV

  • Max sample size: 6×7 cm



Helmholtz Imaging spinning wheel

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