Zeiss Auriga 60 (Auriga 60)
Site:
Karlsruhe
The Zeiss Auriga 60 Dual Beam FIB is a combination of a scanning electron microscope (SEM) and a focused ion beam (FIB) system, which allows imaging and structuring of materials at the nanoscale. It is a DualBeam FIB with EDX, EBSD and vacuum transfer system.
It is equipped with an Omniprobe micromanipulator, an EDAX EDX and EBSD system, a vacuum transfer holder and electrical feed-throughs for in-situ experiments
Configuration
- Operation Voltage:
- High Tension SEM: 200 V - 30 kV
- High Tension FIB: 0.2 kV - 30 kV
- Source
- FEG (Schottky)
- Gallium Liquid Metal Ion Source
- Imaging Detectors:
- In-lens SE, SESI, EsB, 4QBSD
- STEM detector
- Spectroscopy
- EDAX EDX detector
- Diffraction
- EDAX EBSD detector
- Gas Injection System (GIS)
- C, Pt, and Si
- XeF2 for selective etch enhancing
- Gas injection for charge compensation
- Manipulators
- Omniprobe 400 with independent x,y, z motion and rotation
- Transfer System
- High-vacuum transfer system compatible with glove box and UHV deposition system
Resolution
30 kV
Electron Beam [nm]: 1.0
Gallium Ion Beam [nm] : 2.5
15 kV
Electron Beam [nm]: 1.0
1 kV
Electron Beam [nm]: 1.9
Imaging, Analysis and Sample Preparation Techniques
- SE & BSE SEM analysis
- STEM imaging
- EDX analysis
- EBSD analysis
- 3D Slice & View tomography
- TEM sample preparation
- Nanoscale deposition and contacting
Access
Operated as part of the Karlsruhe Nano Micro Facility. Proposal based access; see:
Link: https://www.knmf.kit.edu/
Link: https://www.knmf.kit.edu/
Weblinks
Zeiss Auriga 60 in Helmholtz Imaging CONNECT:
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