High resolution field emission SEM (Nova Nano SEM 450, FEI Thermofisher)

Detectors:
• SE Everhart-Thornley detector (ETD)
• Low vacuum BE detector
• High resolution through-lens detector tunable for SE and BE mode
• High resolution STEM detector for analysis of membranes and thin films in transmission
• IR-CCD camera to track the sample position
• X-Max 150 EDS silicon drift detector for elemental analysis, energy resolution 127 eV @ MnKα (Oxford)
• C-Nano EBSD CMOS detector with AZtecHKL software (Oxford)

Lateral resolution:
• 1.0 nm at 15 kV
• 1.4 nm at 1 kV
• 0.8 nm at 30 kV (STEM)

• Possible translation of sample stage in x/y: 110 x 110 mm
• Navigation and pattering software
• Low vacuum mode
• Beam deceleration option to analyze isolating sample surfaces
• Dynamical tilt
• Gas injection system to write Pt based markers on sample surfaces via electron beam-induced deposition