High resolution field emission SEM (Nova Nano SEM 450, FEI Thermofisher)

Detectors:

• SE Everhart-Thornley detector (ETD)

• Low vacuum BE detector

• High resolution through-lens detector tunable for SE and BE mode

• High resolution STEM detector for analysis of membranes and thin films in transmission

• IR-CCD camera to track the sample position

• X-Max 150 EDS silicon drift detector for elemental analysis, energy resolution 127 eV @ MnKα (Oxford)

• C-Nano EBSD CMOS detector with AZtecHKL software (Oxford)

Lateral resolution:

• 1.0 nm at 15 kV

• 1.4 nm at 1 kV

• 0.8 nm at 30 kV (STEM)

• Possible translation of sample stage in x/y: 110 x 110 mm

• Navigation and pattering software

• Low vacuum mode

• Beam deceleration option to analyze isolating sample surfaces

• Dynamical tilt

• Gas injection system to write Pt based markers on sample surfaces via electron beam-induced deposition