Extreme ultraviolet Microscopy (EUV)
Extreme ultraviolet (EUV) Microscopy exploits the ultrashort wavelengths in particular at a wavelength of 13.5 nm to perform high-resolution imaging. The absorption edges of numerous elements in this spectral range yields excellent material contrast. Moreover, EUV radiation can penetrate materials enabling a nano-scale view into complex three-dimensional structures. In combination with ptychography EUV microscopy can be performed in a lens-less configuration overcoming the limitations of conventional EUV focussing optics extending existing modalities at X-ray photon energies.
Publications
Material-specific high-resolution table-top extreme ultraviolet microscopy
Eschen W, Loetgering L, Schuster V, Klas R, Kirsche A, Berthold L, Steinert M, Pertsch T, Gross H, Krause M, Limpert J, Rothhardt J - Light: Science & Applications - 2022
