Scanning Auger Microscope (SAM)
Site:
Hamburg
RESOLUTION
(nm)
-
10.0
-
ENERGY
(keV)
25.0
DETECTOR
PHI 710 Scanning Auger Nanoprobe
- PHI 710 Scanning Auger Nanoprobe instrument
- Energy range, electrons, 1-25 keV
- Nominal lateral resolution < 10 nm (elements with low concentrations)
- Coaxial cylindrical mirror analyser
- Argon ion gun (5 kV) for surface cleaning, charge neutralization and Auger compositional depth profiling
- Image registration to enhance imaging stability
- Motorized five-axis specimen stage
- Intro camera and ion gauge
- Navigation software to re-localize pre-defined positions on the sample surface
Acquisition Parameter:
Image registration to enhance imaging stability
Weblinks
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