SEM Zeiss EVO 50
Site:
Dresden
RESOLUTION
(nm)
-
3.0
-
SAMPLE SIZE
(mm)
255.0
Description:
- Tungsten cathode
- Acceleration voltage 0.2 - 30 kV
- Resolution: 3 nm at 30 kV
- Detectors:
- Everhart-Thornley secondary electron detector
- 4 quadrant backscatter electron detector
- Chamber: diameter: 365 mm; high: 255 mm
- 5-Axes motorised compucentric specimen stage
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